[文献] Engineering analysis of microdefect formation during

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发表于 2010-12-29 21:39:01 | 显示全部楼层 |阅读模式

Engineering analysis of microdefect formation during
silicon crystal growth
Robert A. Brown*, Zhihong Wang, Tatsuo Mori
Department of Chemical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Ave 3-208,
Cambridge, MA 02139-4307, USA

Engineering analysis of microdefect formation during silicon crystal growth.pdf

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