Analysis of the oxygen impurity atoms beneath the surface

zhangcunbiao

Analysis of the oxygen impurity atoms beneath the surface
of Cz-silicon by CPAA
F. Degas
a
, H. Erramli
b,
*, G. Blondiauxa
a
CERI-CNRS, 3A rue de la Fe Ârollerie, 45071 Orle Âans cedex 2, France
b
Nuclear Physics and Techniques Laboratory, Faculty of Sciences Semlalia, BP 2390, University Cadi Ayyad, Marrakech, Morocco
Received 16 November 1998; accepted 18 March 1999